Kinetic theory of low-temperature plasmas in molecular gases

This work reviews a number of important aspects of the kinetic theory of de or microwave discharge plasmas in N-2, O-2, H-2 and their mixtures. The fundamental problems which are addressed include (1) the determination of the non-equilibrium electron energy distribution function from the Boltzmann equation and its coupling to the vibrational kinetics; and (2) the self-consistent modelling of such discharges taking into account bulk and surface kinetic processes, the gas thermal balance and the charged particle balance. In particular, the mechanisms of dissociation, ionization and production of H- ions are discussed. Comparisons between model predictions and experiment are presented.