Effects of Sputtering Gas Pressure on Electrochromic Properties of Ni Oxyhydroxide Thin Films Prepared by Reactive Sputtering in H2O Atmosphere

被引:17
作者
Abe, Yoshio [1 ]
Ueta, Hideaki [1 ]
Obata, Takeshi [1 ]
Kawamura, Midon [1 ]
Sasaki, Katsutaka [1 ]
Itoh, Hidenobu [1 ]
机构
[1] Kitami Inst Technol, Dept Mat Sci & Engn, Kitami, Hokkaido 0908507, Japan
关键词
NICKEL-OXIDE FILMS; SOL-GEL; DISCHARGE;
D O I
10.1143/JJAP.49.115802
中图分类号
O59 [应用物理学];
学科分类号
摘要
Ni oxyhydroxide (NiOOH) thin films were prepared by reactive sputtering in an atmosphere of H2O gas and the effects of sputtering gas pressure on their electrochromic properties in KOH aqueous electrolyte were studied The largest optical density change was obtained for the thin films deposited under high sputtering gas pressures of approximately 6 7 Pa because of their low film density and chemical composition close to NiOOH Stable transmittance change during coloring and bleaching cycles was obtained for the film from the first cycle up to 100 cycles (C) 2010 The Japan Society of Applied Physics
引用
收藏
页数:4
相关论文
共 23 条
[1]   Preparation of hydrogen-containing Ta2O5 thin films by reactive sputtering using O2+H2Omixed gas [J].
Abe, Yoshio ;
Itadani, Naruhiro ;
Kawamura, Midori ;
Sasaki, Katsutaka ;
Itoh, Hidenobu .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (02) :777-779
[2]   Effect of O2 flow concentration during reactive sputtering of Ni oxide thin films on their electrochemical and electrochromic properties in aqueous acidic and basic electrolyte solutions [J].
Abe, Yoshio ;
Lee, Se-Hee ;
Zayim, Esra Ozkan ;
Tracy, C. Edwin ;
Pitts, J. Roland ;
Deb, Satyen K. .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (10A) :7780-7783
[3]   Microstructural and electrochromic properties of sputter-deposited Ni oxide films grown at different working pressures [J].
Ahn, KS ;
Nah, YC ;
Sung, YE .
JOURNAL OF APPLIED PHYSICS, 2002, 92 (03) :1268-1273
[4]  
[Anonymous], 2003, HDB CHEM PHYS
[5]  
BABA N, 1991, ELECTROCHROMIC DISPL, P27
[6]   Electrochromic degradation in nickel oxide thin film: A self-discharge and dissolution phenomenon [J].
Bouessaya, I ;
Rougier, A ;
Poizot, P ;
Moscovici, J ;
Michalowicz, A ;
Tarascon, JM .
ELECTROCHIMICA ACTA, 2005, 50 (18) :3737-3745
[7]   THE ELECTROCHROMIC PROPERTIES OF SPUTTERED NICKEL-OXIDE FILMS [J].
CONELL, RS ;
CORRIGAN, DA ;
POWELL, BR .
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1992, 25 (3-4) :301-313
[8]   Nanocomposite Counter Electrode Materials for Electrochromic Windows [J].
Gillaspie, Dane ;
Norman, Andrew ;
Tracy, C. Edwin ;
Pitts, J. Roland ;
Lee, Se-Hee ;
Dillon, Anne .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2010, 157 (03) :H328-H331
[9]  
Granqvist C.G., 1995, Handbook of Inorganic Electrochromic Materials, P1
[10]   PREPARATION AND ELECTROCHROMIC PROPERTIES OF RF-SPUTTERED NIOX FILMS PREPARED IN AR/O-2/H-2 ATMOSPHERE [J].
KITAO, M ;
IZAWA, K ;
URABE, K ;
KOMATSU, T ;
KUWANO, S ;
YAMADA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (12A) :6656-6662