Pulsed reactive chemical vapor deposition in the C-Ti-Si system from H2/TiCl4/SiCl4

被引：39

作者：

Jacques, S ^{[1
]}

Di-Murro, H ^{[1
]}

Berthet, MP ^{[1
]}

Vincent, H ^{[1
]}

机构：

[1] Univ Lyon 1, CNRS, UMR 5615, Lab Multimat & Interfaces, F-69622 Villeurbanne, France

来源：

THIN SOLID FILMS | 2005年 / 478卷 / 1-2期

关键词：

chemical vapour deposition (CVD) (68); carbides (57); multilayers (299); transmission electron microscopy (TEM) (496);

D O I：

10.1016/j.tsf.2004.09.043

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A new route was explored to produce Ti3SiC2-based thin coatings on carbonaceous substrates. This method combines low pressure-pulsed chemical vapor deposition (CVD) and reactive CVD, the gaseous phase being a mixture Of SiCl4, TiCl4 and H-2. It consists in depositing a pyrocarbon film on the substrate, converting C into SiC (or TiCx) and then converting this carbide into Ti3SiC2. Experiments and thermodynamic calculations were performed and compared. The films were investigated by X-ray diffraction and transmission electron microscopy. Several microstructures consisting of various combinations of Ti3SiC2, C, SiC, TiCx and TiSi2 were obtained. (c) 2004 Elsevier B.V. All rights reserved.

引用

页码：13 / 20

页数：8

共 24 条

[1] Synthesis and characterization of a remarkable ceramic: Ti3SiC2 [J].

Barsoum, MW ;

ElRaghy, T .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1996, 79 (07) :1953-1956

[2] Experimental investigation and thermodynamic calculation of the titanium-silicon-carbon system [J].

Du, Y ;

Schuster, JC ;

Seifert, HJ ;

Aldinger, F .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2000, 83 (01) :197-203

[3] STRUCTURE OF PYROCARBON INFILTRATED BY PULSE-CVI [J].

DUPEL, P ;

BOURRAT, X ;

PAILLER, R .

CARBON, 1995, 33 (09) :1193-1204

[4] PULSE CHEMICAL-VAPOR-DEPOSITION AND INFILTRATION OF PYROCARBON IN MODEL PORES WITH RECTANGULAR CROSS-SECTIONS .2. STUDY OF THE INFILTRATION [J].

DUPEL, P ;

PAILLER, R ;

BOURRAT, X ;

NASLAIN, R .

JOURNAL OF MATERIALS SCIENCE, 1994, 29 (04) :1056-1066

[5] THE MECHANICAL-BEHAVIOR OF CERAMIC MATRIX COMPOSITES [J].

EVANS, AG ;

MARSHALL, DB .

ACTA METALLURGICA, 1989, 37 (10) :2567-2583

[6] CHEMICALLY VAPOR-DEPOSITED TI3SIC2 [J].

GOTO, T ;

HIRAI, T .

MATERIALS RESEARCH BULLETIN, 1987, 22 (09) :1195-1201

[7] Characterization of SiC/C (B)/SiC microcomposites by transmission electron microscopy [J].

Jacques, S ;

Guette, A ;

Langlais, F ;

Bourrat, X .

JOURNAL OF MATERIALS SCIENCE, 1997, 32 (11) :2969-2975

[8] Laminated C-SiC matrix composites produced by CVI [J].

Lackey, WJ ;

Vaidyaraman, S ;

More, KL .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1997, 80 (01) :113-116

[9] Mechanical properties and mechanism of damage tolerance for Ti3SiC2 [J].

Li, SB ;

Xie, JX ;

Zhao, JQ ;

Zhang, LT .

MATERIALS LETTERS, 2002, 57 (01) :119-123

[10]

MENDVEDEVA NI, 1998, PHYS REV B, V58, P16042

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