Optimization of the growth of Ga1-xMnxN epilayers using plasma-assisted MBE

被引:18
作者
Kuroda, S
Bellet-Amalric, E
Biquard, X
Cibert, J
Giraud, R
Marcet, S
Mariette, H
机构
[1] Univ Grenoble 1, CEA, CNRS Grp Nanophys & Semicond, Spectrometrie Phys Lab, F-38054 Grenoble 9, France
[2] CEA, DRFMC SP2M, F-38054 Grenoble 9, France
[3] Univ Tsukuba, Inst Mat Sci, Tsukuba, Ibaraki 3058573, Japan
来源
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS | 2003年 / 240卷 / 02期
关键词
D O I
10.1002/pssb.200303367
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
A systematic compositional and structural study of GaN: Mn epilayers grown by molecular beam epitaxy (MBE) was performed, with a special attention to the dependence on the growth conditions. The "growth diagram" related to the Ga/N flux ratio for GaN was modified by adding Mn flux. In particular, the stable Ga-bilayer coverage on the surface for the Ga-rich condition was reduced in the presence of Mn. The Mn incorporation in the epilayers was found to be strongly dependent on the Ga/N flux ratio. The X-ray diffraction (XRD) and extended X-ray absorption fine structure (EXAFS) measurements revealed a clear contrast between the precipitation of a perovskite compound GaMn3N at Mn compositions higher than 1.7%, and the single phase of the wurtzite Ga1-xMnxN at lower Mn compositions. The single-phase epilayers (x less than or equal to 1.7%) exhibited intrinsic ferromagnetic behaviors at room temperature. (C) 2003 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:443 / 446
页数:4
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