Initial growth of SnO2 thin film on the glass substrate deposited by the spray pyrolysis technique

被引：67

作者：

Murakami, Kenji

Nakajima, Kiyofumi

Kaneko, Shoji

机构：

[1] Shizuoka Univ, Elect Res Inst, Hamamatsu, Shizuoka 4328011, Japan

[2] ROHM Hamamatsu Co Ltd, Hamamatsu, Shizuoka 4350038, Japan

[3] SPD Lab Inc, HI Cube, Hamamatsu, Shizuoka 4328003, Japan

来源：

THIN SOLID FILMS | 2007年 / 515卷 / 24期

关键词：

SnO2 thin film; spray pyrolysis; preferential orientation; nucleation; film growth; AFM; XPS;

D O I：

10.1016/j.tsf.2007.03.128

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Spray pyrolysis of di-n-butyltin(W) diacetate (DBTDA) has led to the deposition of [200]-oriented SnO2 film on a glass substrate. In order to clarify growth mechanism of the preferential orientation the sprayed SnO2 thin film has been investigated by using the atomic force microscopy and the X-ray photoelectron spectroscopy. The results have suggested that the sprayed solution forms the SnO2 small particles on the glass substrate and they spread overall relatively soon. At the very early stage each particle grows with almost the same rate and only its density increases with no change in a surface roughness. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：8632 / 8636

页数：5

共 11 条

[1]

JARZEBSKI ZM, 1976, J ELECTROCHEM SOC, V123, P199

[2] Self-assembled island formation of LiNbO3 by pulsed laser deposition on α-Al2O3 substrate [J].