Thin film metallic glasses as new mems materials

被引：18

作者：

Hata, S ^{[1
]}

Sakurai, J ^{[1
]}

Shimokohbe, A ^{[1
]}

机构：

[1] Tokyo Inst Technol, Precis & Intelligence Lab, Tokyo, Japan

来源：

MEMS 2005 Miami: Technical Digest | 2005年

关键词：

D O I：

10.1109/MEMSYS.2005.1453971

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In order to apply the metallic glasses to MEMS, Pd-based, Zr-based and Cu-based thin film metallic glasses (TFMGs) are fabricated successfully using an RF magnetron sputtering system. The TFMGs exhibit high strength and high elastic limit at room temperature and low viscosity (under 10(13) Pa center dot s) at supercooled liquid region (SCLR). These characteristics are desirable for utilization of TFMGs as three-dimensional (3D) micro-elastic-mechanisms. 3D microstructures are realized by novel microforming methods at the SCLR. These methods can be divided into two categories, namely the 'deformation-heating method' and the 'heating-deformation method'. Using those new microforming methods, 3D MEMS made of TFMG with new shapes and functions are demonstrated.

引用

页码：479 / 482

页数：4

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