Influence of the surface treatment on the homoepitaxial growth of SrTiO3

被引:36
作者
Koster, G [1 ]
Kropman, BL [1 ]
Rijnders, GJHM [1 ]
Blank, DHA [1 ]
Rogalla, H [1 ]
机构
[1] Univ Twente, Dept Appl Phys, Low Temp Div, NL-7500 AE Enschede, Netherlands
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1998年 / 56卷 / 2-3期
关键词
oxide; surface treatment; PLD; RHEED;
D O I
10.1016/S0921-5107(98)00238-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In order to study the homoepitaxial growth of SrTiO3, several techniques have been used to obtain atomically flat surfaces. Here, the effect of annealing in an oxygen environment and etching in a buffered HF solution on the surface morphology is studied by atomic force microscopy and reflection high-energy electron diffraction. We will show the effect of these substrate treatments on the initial growth of SrTiO3. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:209 / 212
页数:4
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