Properties of TiO2-based transparent conducting oxides

被引：177

作者：

Hitosugi, Taro ^{[1
,2
]}

Yamada, Naoomi ^{[1
]}

Nakao, Shoichiro ^{[1
]}

Hirose, Yasushi ^{[1
,3
]}

Hasegawa, Tetsuya ^{[1
,3
]}

机构：

[1] KAST, Kawasaki, Kanagawa 2130012, Japan

[2] Tohoku Univ, Adv Inst Mat Res WPI AIMR, Sendai, Miyagi 9808577, Japan

[3] Univ Tokyo, Dept Chem, Tokyo 1130033, Japan

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2010年 / 207卷 / 07期

关键词：

electrical properties; optical properties; PLD; sputter; structure; TiO2; transparent conducting oxide; NB-DOPED TIO2; OPTICAL-PROPERTIES; THIN-FILMS; LOW-RESISTIVITY; FABRICATION; DURABILITY; CONVERSION; GROWTH; GLASS;

D O I：

10.1002/pssa.200983774

中图分类号：

T [工业技术];

学科分类号：

120111 [工业工程];

摘要：

The development and properties of titanium dioxide (TiO2)-based transparent conducting oxides (TCO), which exhibit properties comparable to those of In2-xSnxO3 (ITO), are reviewed in this article. An epitaxial thin film of anatase Ti0.94Nb0.06O2 exhibited a resistivity (p) of 2.3 x 10(-4) Omega cm and internal transmittance of similar to 95% in the visible light region. Furthermore, we prepared polycrystalline films with p of 6.4 x 10(-4) Omega cm at room temperature on glass substrates by using sputtering. We focus on characteristics unique to TiO2-based TCO, such as a high refractive index, high transmittance in infrared, and high stability in reducing atmospheres. Possible applications of TiO2-based TCOs, as well as the mechanism of the transparent conducting properties found in this d-electron-based TCO, are discussed in this review. (C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

引用

页码：1529 / 1537

页数：9

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