The integration of a chemiresistive film overlay with a surface acoustic wave microsensor

被引:17
作者
Galipeau, JD
LeGore, LJ
Snow, K
Caron, JJ
Vetelino, JF
Andle, JC
机构
[1] UNIV MAINE,DEPT ELECT & COMP ENGN,ORONO,ME 04469
[2] UNIV MAINE,SURFACE SCI & TECHNOL LAB,ORONO,ME 04469
[3] MTR INC,BROOKINGS,SD 57006
[4] BIODE INC,CAPE ELIZABETH,ME 04107
关键词
surface acoustic wave hydrogen sulfide sensor; chemiresistive overlay; tungsten trioxide;
D O I
10.1016/S0925-4005(97)80047-0
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The theory describing the operation of a surface acoustic wave (SAW) hydrogen sulfide (H2S) sensor was examined. This sensor employs a tungsten trioxide (WO3) chemiresistive overlay deposited as the sensing element on a SAW delay line. Previous work has shown that a change in the film's DC conductivity upon exposure to a target gas, such as H2S, has far more influence on the SAW than the film's mechanical properties. However, early work also pointed out that higher sensitivities had been experienced experimentally than the current theory suggests. The objective of the current work was to reexamine the theory describing the effect of a film's electrical properties on SAW velocity. Perturbation theory has been employed to characterize the effects of the film's DC conductivity, dielectric constant and device operating frequency on the SAW gas sensor Experimental work was conducted on a SAW delay line residing on a cut of quartz optimized for stability at high temperature.
引用
收藏
页码:158 / 163
页数:6
相关论文
共 8 条
[1]  
[Anonymous], 1973, PHYS TODAY
[2]  
BRYANT A, P IEEE 1981 ULTR S, P171
[3]  
CARON JJ, P IEEE 1996 ULTR S, P461
[4]   SAW SENSORS [J].
DAMICO, A ;
VERONA, E .
SENSORS AND ACTUATORS, 1989, 17 (1-2) :55-66
[5]  
FALCONER R, 1993, THESIS U MAINE
[6]  
GALIPEAU J, 1996, THESIS U MAINE
[7]   THEORY, DESIGN AND OPERATION OF A SURFACE-ACOUSTIC-WAVE HYDROGEN-SULFIDE MICROSENSOR [J].
GALIPEAU, JD ;
FALCONER, RS ;
VETELINO, JF ;
CARON, JJ ;
WITTMAN, EL ;
SCHWEYER, MG ;
ANDLE, JC .
SENSORS AND ACTUATORS B-CHEMICAL, 1995, 24 (1-3) :49-53
[8]  
XU Z, 1990, THESIS U MAINE