Spontaneous Formation of Periodic Nanostructures by Localized Dynamic Wrinkling

被引：36

作者：

Ahn, Se Hyun ^{[2
]}

Guo, L. Jay ^{[1
]}

机构：

[1] Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA

[2] Univ Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA

来源：

NANO LETTERS | 2010年 / 10卷 / 10期

基金：

美国国家科学基金会;

关键词：

Wrinkling; periodic structures; nanopatterns; template-free patterning; NANOIMPRINT LITHOGRAPHY;

D O I：

10.1021/nl102694a

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Micro/nanoscale periodic structures are widely used in display, optics and bio industries as key functional elements We present a novel nanopacterning method, localized dynamic wrinkling (LOW), which creates micro/nanoscale metal gratings continuously by simply sliding a flat edge of a hard material over a thin metal surface coated on a polymer layer The LOW process presented in this paper is an etching- and template-free nanopatterning technology based on nanoscale wrinkling phenomenon This simple process enables spontaneous formation of large-area metal gratings with controllable periodicity from micrometer down to 120 nm

引用

页码：4228 / 4234

页数：7

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