Hybrid model of a rectangular hollow cathode discharge

被引:78
作者
Donko, Z [1 ]
机构
[1] Hungarian Acad Sci, Res Inst Solid State Phys & Opt, Dept Laser Phys, H-1525 Budapest, Hungary
来源
PHYSICAL REVIEW E | 1998年 / 57卷 / 06期
关键词
D O I
10.1103/PhysRevE.57.7126
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
A rectangular hollow cathode discharge was investigated by means of a two-dimensional self-consistent hybrid model combining Monte Carlo simulation of the motion of fast electrons and a fluid description of slow electrons and positive ions. Our calculations were carried out for a cold-cathode de abnormal glow discharge in helium, operating at moderate (similar to 1 mA/cm(2)) current densities and at low (similar to 1 mbar) pressures. The results demonstrate the existence of the hollow cathode effect in the discharge. On the other hand the energy distribution function of electrons indicates that a considerable number of fast electrons is absorbed by the anode, representing a major loss for the maintenance of the discharge. A significant fraction of primary electrons (approximate to 5-20%) was absorbed by the anode before they were able to produce any ions. Due to the loss of high-energy electrons at the absorbing anodes, ionization is less efficient than that in conventional (e.g., cylindrical) hollow cathodes, thereby explaining the increasing voltage-linear current density characteristics of the discharge. Backscattering of high-energy electrons from the anodes significantly affects the discharge characteristics: a backscattering coefficient of 0.2 resulted in approximate to 90% increase of the He+ density and approximate to 60% increase of the linear current density at 2 mbar pressure and 300 V voltage.
引用
收藏
页码:7126 / 7137
页数:12
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