Synthesis and measurement of Os-Si multilayer mirrors optimized for the wavelength 380 angstrom

被引:8
作者
Kozhevnikov, IV [1 ]
Balakireva, LL [1 ]
Fedorenko, AI [1 ]
Kopealets, IA [1 ]
Levashov, VE [1 ]
Stetsenko, AN [1 ]
Struk, II [1 ]
Vinogradov, AV [1 ]
机构
[1] KHARKOV POLYTECH UNIV,KHARKOV 310002,UKRAINE
关键词
D O I
10.1016/0030-4018(95)00713-X
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Flat and spherical Os-Si multilayer mirrors were synthesized and studied. Measured normal incidence reflectivity was 20% at the wavelength lambda = 380 Angstrom. The effect of impurities in silicon layers on the multilayer reflectivity in ultra soft X-ray region is discussed.
引用
收藏
页码:13 / 17
页数:5
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