Microfabricated dynamic scanning force microscope using a three dimensional piezoelectric T-shape actuator

A microfabricated dynamic scanning force microscope (DSFM) system integrated with a self-exciting piezoelectric force sensor and position actuators for three dimensions is presented. It is a cantilever-bridge structure composed of two PZT (lead titanate zirconate) layers. The electrodes of the levers are each divided into two sections. Electric fields applied to the separated sections can induce lever deflection and actuate the tip in the x, y, and z directions. The cantilever can vibrate in the z direction and sense the deflection by its self to detect the surface topography in the cyclic contact made. The microscopy sensitivity in the vertical direction is measured as 0.32 nA/nm, with actuation rates of 83 nm/+/-V and 73 nm/+/-V in X and Y directions, respectively.