Investigation of the adhesion and wear of metal containing amorphous carbon coatings

被引:2
作者
OLeary, A
Dowling, D
Rizza, R
Donnelly, K
Kola, P
Kelly, TC
机构
来源
FRONTIERS FOR ENGINEERING MATERIALS | 1996年 / 118-卷
关键词
PVD; mechanical properties; diamond-like carbon; sputtering;
D O I
10.4028/www.scientific.net/KEM.118-119.271
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Physical Vapour Deposited (PVD) hard coatings are being used to provide improvements in mechanical, tribological and decorative properties on a wide variety of substrate materials. This paper deals with a complex PVD hard coating consisting of a series of interlayers with graded interfaces: Ti, TiN, TiCN, TiC, a-C:Ti. The top layer was examined by Raman spectroscopy and found to be a diamond-like carbon coating. The incorporation of titanium causes relaxation of compressive stress allowing the coating to be deposited at thicknesses much larger than normal. The effect of varying the magnetron sputtering deposition parameters is discussed in relation to the variation of the coatings mechanical properties including adhesion, wear resistance and hardness.
引用
收藏
页码:271 / 277
页数:7
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