Preparation of germanium thin film by a coating technique using a soluble organogermanium cluster as a precursor

被引：12

作者：

Watanabe, A ^{[1
]}

Unno, M

Hojo, F

Miwa, T

机构：

[1] Tohoku Univ, Inst Chem React Sci, Aoba Ku, Sendai, Miyagi 9808577, Japan

[2] Hitachi Ltd, Hitachi Res Lab, Hitachi, Ibaraki 3191292, Japan

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 2001年 / 20卷 / 06期

关键词：

D O I：

10.1023/A:1010903827801

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A novel organogermanium compound which has a high solubility to common organic solvents was synthesized. It was shown that the film of the organogermanium cluster prepared by a coating technique can be converted to inorganic germanium films such as a-Ge and poly-Ge by heat treatment accompanying the elimination of the organic substituent.

引用

页码：491 / 493

页数：3

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