共 7 条
- [1] NANOWRITER - A NEW HIGH-VOLTAGE ELECTRON-BEAM LITHOGRAPHY SYSTEM FOR NANOMETER-SCALE FABRICATION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06): : 2009 - 2013
- [6] Tiwari S, 1996, APPL PHYS LETT, V68, P1377, DOI 10.1063/1.116085
- [7] YANO K, 1993, INT ELECT DEVICES M, V93, P541