Silicon single electron memory cell

被引:68
作者
Stone, NJ [1 ]
Ahmed, H [1 ]
机构
[1] Univ Cambridge, Cavendish Lab, Microelect Res Ctr, Cambridge CB3 0HE, England
关键词
D O I
10.1063/1.122401
中图分类号
O59 [应用物理学];
学科分类号
摘要
A compact single-electron memory cell has been fabricated in silicon using a process that is compatible with complementary metal-oxide-semiconductor circuit fabrication. The device is based on the Coulomb blockade effect observed in highly doped silicon nanowires. The circuit shows clear memory operation with a >100 mV gap between "0" and "1" levels when tested at a temperature of 4.2 K. The response of the circuit to write and erase pulse sequences is also presented. (C) 1998 American Institute of Physics. [S0003-6951(98)02041-5].
引用
收藏
页码:2134 / 2136
页数:3
相关论文
共 7 条
  • [1] NANOWRITER - A NEW HIGH-VOLTAGE ELECTRON-BEAM LITHOGRAPHY SYSTEM FOR NANOMETER-SCALE FABRICATION
    CHEN, ZW
    JONES, GAC
    AHMED, H
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06): : 2009 - 2013
  • [2] A silicon single-electron transistor memory operating at room temperature
    Guo, LJ
    Leobandung, E
    Chou, SY
    [J]. SCIENCE, 1997, 275 (5300) : 649 - 651
  • [3] SINGLE-ELECTRON MEMORY
    NAKAZATO, K
    BLAIKIE, RJ
    AHMED, H
    [J]. JOURNAL OF APPLIED PHYSICS, 1994, 75 (10) : 5123 - 5134
  • [4] Gate controlled Coulomb blockade effects in the conduction of a silicon quantum wire
    Smith, RA
    Ahmed, H
    [J]. JOURNAL OF APPLIED PHYSICS, 1997, 81 (06) : 2699 - 2703
  • [5] Silicon single-electron memory structure
    Stone, NJ
    Ahmed, H
    [J]. MICROELECTRONIC ENGINEERING, 1998, 42 : 511 - 514
  • [6] Tiwari S, 1996, APPL PHYS LETT, V68, P1377, DOI 10.1063/1.116085
  • [7] YANO K, 1993, INT ELECT DEVICES M, V93, P541