共 28 条
[2]
Baumann H., 1987, EUR MAT RES SOC C P, V17, P343
[5]
BOUTARD D, 1989, J APPL PHYS, V65, P3831
[7]
ANNEALING OF PLASMA SILICON OXYNITRIDE FILMS
[J].
JOURNAL OF APPLIED PHYSICS,
1986, 60 (07)
:2543-2547
[8]
Feldman L. C., 1986, Fundamentals of Surface and Thin Film Analysis
[9]
FERENZENA LS, 1995, NUCL INSTRUM METH B, V105, P134