Process control for plasma processing of polymers

被引:48
作者
Favia, P [1 ]
Creatore, M [1 ]
Palumbo, F [1 ]
Colaprico, V [1 ]
d'Agostino, R [1 ]
机构
[1] Univ Bari, Dipartimento Chim, Ctr Studio Chim Plasmi, CNR, I-70126 Bari, Italy
关键词
plasma polymers; process control; plasma treatments; actinometry; surface analysis;
D O I
10.1016/S0257-8972(01)01191-4
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
PE-CVD processes of a variety of coatings - fluoropolymers, SiOx, PEO- and Ag-PEO-like, -COOH functional layers - are described, as well as plasma treatments aimed to selectively graft -NH2 groups on polymers, with the use of spectroscopic plasma- and surface-diagnostics parameters of potential use for process transfer and control in industrial applications. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
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页码:1 / 6
页数:6
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