Theory of hydrogen in silicon carbide

被引:14
作者
Deák, P [1 ]
Gali, A [1 ]
Aradi, B [1 ]
机构
[1] Tech Univ Budapest, Dept Atom Phys, HU-1111 Budapest, Hungary
来源
SILICON CARBIDE AND RELATED MATERIALS, ECSCRM2000 | 2001年 / 353-356卷
关键词
compensation; hydrogen concentration; interstitial H; passivation; T5; center; vacancy-hydrogen complex;
D O I
10.4028/www.scientific.net/MSF.353-356.421
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Interaction of hydrogen atoms is considered with the "perfect" lattice and with isolated vacancies (V)? by means of ab initio model calculations in 3C- and 4H-SiC. We find that interstitial atomic hydrogen acts as a relatively shallow donor in 3C- and as an amphoteric trap in 4H-SiC. Only two H atoms can be accomodated by V(C) and (V(C) + nH) complexes are hole traps (n=1,2). V(Si) can in principle be saturated with W but (V(Si) + nH) complexes are electron traps for n = 1,2. We predict high concentration of mobile, compensating H(i)(+) centers in p-type material. In n-type SiC the stable form of interstitial hydrogen is H(2) (with low solubility) and the dominant hydrogen defects are (V(Si) + nH) traps. H(i) is attracted by shallow accepters and (V(Si) + H) but not by shallow donors or (V(C) + H). Spectroscopic properties of H-related defects have been calculated. We propose that the T5 center is more likely to arise from (V(C) + 2H)(+) than from V(C)(+).
引用
收藏
页码:421 / 426
页数:6
相关论文
共 19 条
[1]   Defect energy levels in electron-irradiated and deuterium-implanted 6H silicon carbide [J].
Aboelfotoh, MO ;
Doyle, JP .
PHYSICAL REVIEW B, 1999, 59 (16) :10823-10829
[2]   Hydrogen passivation of silicon carbide by low-energy ion implantation [J].
Achtziger, N ;
Grillenberger, J ;
Witthuhn, W ;
Linnarsson, MK ;
Janson, MS ;
Svensson, BG .
APPLIED PHYSICS LETTERS, 1998, 73 (07) :945-947
[3]  
ARADI B, UNPUB PHYS REV B
[4]  
BOCKSTEDTE M, 1997, COMP PHYS COMMUN, V107, P18
[5]  
Briddon PR, 2000, PHYS STATUS SOLIDI B, V217, P131, DOI 10.1002/(SICI)1521-3951(200001)217:1<131::AID-PSSB131>3.0.CO
[6]  
2-M
[7]   PHOTOLUMINESCENCE OF H-IMPLANTED AND D-IMPLANTED 4H SIC [J].
CHOYKE, WJ ;
PATRICK, L .
PHYSICAL REVIEW B, 1974, 9 (08) :3214-3219
[8]   ACCEPTOR AND DONOR NEUTRALIZATION BY HYDROGEN IN 6H SIC [J].
CLERJAUD, B ;
GENDRON, F ;
PORTE, C ;
WILKENING, W .
SOLID STATE COMMUNICATIONS, 1995, 93 (05) :463-464
[9]   Overcoordinated hydrogens in the carbon vacancy:: Donor centers of SiC [J].
Gali, A ;
Aradi, B ;
Deák, P ;
Choyke, WJ ;
Son, NT .
PHYSICAL REVIEW LETTERS, 2000, 84 (21) :4926-4929
[10]   HYDROGEN PASSIVATION OF DONORS AND ACCEPTERS IN SIC [J].
GENDRON, F ;
PORTER, LM ;
PORTE, C ;
BRINGUIER, E .
APPLIED PHYSICS LETTERS, 1995, 67 (09) :1253-1255