Fourier transform method for measurement of thin film thickness by speckle interferometry

被引：10

作者：

Karaalioglu, C ^{[1
]}

Skarlatos, Y ^{[1
]}

机构：

[1] Bogazici Univ, TR-80815 Istanbul, Turkey

来源：

OPTICAL ENGINEERING | 2003年 / 42卷 / 06期

关键词：

Fourier transforms; thin films; speckle interferometry;

D O I：

10.1117/1.1572498

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The surface profile of an AI thin film and its thickness are observed by electronic speckle pattern interferometry (ESPI). The Michelson interferometer is used as our basic interferometric system to obtain interference fringes on a CCD camera. These interference fringes depend on the path differences due to the surface contours of the thin film. The interference fringes are analyzed with the fast Fourier transform method and a wrapped phase is obtained. An unwrapping procedure is used to obtain a continuous phase. Results on thickness measurement are presented. (C) 2003 Society of Photo-Optical Instrumentation Engineers.

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收藏

页码：1694 / 1698

页数：5

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