A ZnO nanorod based layered ZnO/64° YX LiNbO3SAW hydrogen gas sensor

被引：85

作者：

Sadek, A. Z. ^{[1
]}

Wlodarski, W.

Li, Yx

Yu, W.

Li, X.

Yu, X.

Kalantar-Zadeh, K.

机构：

[1] RMIT Univ, Sch Elect & Comp Engn, Melbourne, Vic, Australia

[2] Chinese Acad Sci, Shanghai Inst Ceram, Shanghai 200050, Peoples R China

来源：

THIN SOLID FILMS | 2007年 / 515卷 / 24期

关键词：

ZnO; nanorod; gas sensor; H-2;

D O I：

10.1016/j.tsf.2007.04.009

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A zinc oxide (ZnO) nanorod based surface acoustic wave (SAW) sensor has been developed and investigated towards hydrogen (H-2) gas. The ZnO nanorods were deposited onto a layered ZnO/64 degrees YX LiNbO3 substrate using a liquid solution method. Micro-characterization results revealed that the diameters of ZnO nanorods are around 100 and 40 nm on LiNbO3 and An (metallization for electrodes), respectively. The sensor was exposed to different concentrations of H2 in synthetic air at operating temperatures between 200 degrees C and 300 degrees C. The study showed that the sensor responded with highest frequency shift at 265 degrees C. At this temperature, stable baseline and fast response and recovery were observed. (c) 2007 Elsevier B.V All rights reserved.

引用

页码：8705 / 8708

页数：4

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