Thin film deposition using spray pyrolysis

被引:503
作者
Perednis, D [1 ]
Gauckler, LJ [1 ]
机构
[1] Swiss Fed Inst Technol, Dept Mat, CH-8093 Zurich, Switzerland
关键词
spray pyrolysis; thin films; properties of deposited films;
D O I
10.1007/s10832-005-0870-x
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Spray pyrolysis has been applied to deposit a wide variety of thin films. These films were used in various devices such as solar cells, sensors, and solid oxide fuel cells. It is observed that often the properties of deposited thin films depend on the preparation conditions. An extensive review of the effects of spray parameters on film quality is given to demonstrate the importance of the process of optimization. The substrate surface temperature is the most critical parameter as it influences film roughness, cracking, crystallinity, etc. Processes involved in the spray pyrolysis technique are discussed in this review as well.
引用
收藏
页码:103 / 111
页数:9
相关论文
共 51 条
[21]  
Hill J.E., 1964, US Patent, Patent No. [3, 148, 084, 3148084]
[22]   CHARACTERIZATION OF THE DECOMPOSITION PRODUCTS OF ZIRCONIUM ACETYLACETONATE - NITROGEN ADSORPTION AND SPECTROTHERMAL INVESTIGATION [J].
ISMAIL, HM .
POWDER TECHNOLOGY, 1995, 85 (03) :253-259
[23]  
Kim SG, 2000, THIN SOLID FILMS, V377, P694, DOI 10.1016/S0040-6090(00)01283-9
[24]   Novel spray-pyrolysis deposition of cuprous oxide thin films [J].
Kosugi, T ;
Kaneko, S .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1998, 81 (12) :3117-3124
[25]   AERODYNAMICS OF NOZZLES USED IN SPRAY PYROLYSIS [J].
LAMPKIN, CM .
PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS, 1979, 1 (04) :405-416
[26]   An experimental and modeling investigation of particle production by spray pyrolysis using a laminar flow aerosol reactor [J].
Lenggoro, IW ;
Hata, T ;
Iskandar, F ;
Lunden, MM ;
Okuyama, K .
JOURNAL OF MATERIALS RESEARCH, 2000, 15 (03) :733-743
[27]   Growth of yttria stabilized zirconia thin films by metallo-organic, ultrasonic spray pyrolysis [J].
Matsuzaki, Y ;
Hishinuma, M ;
Yasuda, I .
THIN SOLID FILMS, 1999, 340 (1-2) :72-76
[28]   INFLUENCE OF DIFFERENT PROCESS PARAMETERS ON PHYSICAL-PROPERTIES OF FLUORINE-DOPED INDIUM OXIDE THIN-FILMS [J].
MIRZAPOUR, S ;
ROZATI, SM ;
TAKWALE, MG ;
MARATHE, BR ;
BHIDE, VG .
JOURNAL OF MATERIALS SCIENCE, 1994, 29 (03) :700-707
[29]  
Mochel J. M., 1951, US Patent, Patent No. [2 564 707, 2564707, 2,564,707]
[30]   SPRAY PYROLYSIS PROCESSING [J].
MOONEY, JB ;
RADDING, SB .
ANNUAL REVIEW OF MATERIALS SCIENCE, 1982, 12 :81-101