MBE growth of cubic GaN on GaAs substrates

被引:63
作者
Yang, H
Brandt, O
Ploog, K
机构
[1] Paul-Drude Inst. F., D-10117 Berlin
来源
PHYSICA STATUS SOLIDI B-BASIC RESEARCH | 1996年 / 194卷 / 01期
关键词
D O I
10.1002/pssb.2221940112
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
We review our recent results on plasma-assisted molecular beam epitaxy of cubic GaN films on GaAs(001). The crucial role of the nucleation stage for obtaining epitaxial growth is highlighted by reflection high-energy electron diffraction and transmission electron microscopy. For the subsequent growth, it is found that the surface stoichiometry determines the phase composition of the epilayers as determined by X-ray reciprocal space mapping, Raman and cathodoluminescence spectroscopy. For an in situ control of the surface stoichiometry, we develop a method based on the transitions of the surface reconstructions of cubic (001)GaN. Films grown under conditions optimized by this method are single-phase cubic and exhibit intense excitonic luminescence up to room temperature.
引用
收藏
页码:109 / 120
页数:12
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