Effects of Pb(Zn1/3Nb2/3)O3 addition and postannealing temperature on the electrical properties of Pb(ZrxTi1-x)O3 thick films prepared by aerosol deposition method

被引:43
作者
Choi, Jong-Jin [1 ]
Hahn, Byung-Dong [1 ]
Ryu, Jungho [1 ]
Yoon, Woon-Ha [1 ]
Park, Dong-Soo [1 ]
机构
[1] Korea Inst Mat Sci, Dept Future Technol, Gyeongnam 641831, South Korea
关键词
D O I
10.1063/1.2769342
中图分类号
O59 [应用物理学];
学科分类号
摘要
Effects of the lead zinc niobate (PZN) addition and postannealing temperature on the electrical properties of the lead zirconate titanate (PZT) films were observed to improve electrical properties of the PZT film. The PZN content was varied from 0% to 40%, and the postannealing temperature was varied from 500 to 900 degrees C. The as-deposited film had a fairly dense microstructure without any cracking and showed a single perovskite phase formed with nanosized grains. Meanwhile, rapid grain growth was observed when the postannealing temperature was increased from 700 to 900 degrees C. The PZN-added PZT film showed poorer electrical properties than the pure PZT film did when the films were annealed at 700 degrees C but higher remnant polarization, dielectric constant, and piezoelectric response when the films were annealed at 900 degrees C. Remnant polarization value, relative dielectric constant, and piezoelectric constant of the 20% PZN-added PZT films annealed at 900 degrees C were 50.0 mu C/cm(2), 1643, and 200 pC/N, respectively, which are values sufficiently high to be comparable with the bulk specimen sintered at 1200 degrees C. (c) 2007 American Institute of Physics.
引用
收藏
页数:6
相关论文
共 18 条
[1]   Microstructure and electrical properties of lead zirconate titanate (Pb(Zr52/Ti48)O3) thick films deposited by aerosol deposition method [J].
Akedo, J ;
Lebedev, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (9B) :5397-5401
[2]   Aerosol deposition of ceramic thick films at room temperature: Densification mechanism of ceramic layers [J].
Akedo, Jun .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2006, 89 (06) :1834-1839
[3]   Investigation the effects of the excess Pb content and annealing conditions on the microstructure and ferroelectric properties of PZT (52-48) films prepared by sol-gel method [J].
Chen Zhu ;
Zeng Yong ;
Yang Chentao ;
Yang Bangchao .
APPLIED SURFACE SCIENCE, 2006, 253 (03) :1500-1505
[4]  
DAUSCH DE, 1992, ISAF 92 : PROCEEDINGS OF THE EIGHTH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, P297, DOI 10.1109/ISAF.1992.300691
[5]   Electroceramic thick film fabrication for MEMS [J].
Dorey, RA ;
Whatmore, RW .
JOURNAL OF ELECTROCERAMICS, 2004, 12 (1-2) :19-32
[6]   Perovskite stabilization and electromechanical properties of polycrystalline lead zinc niobate-lead zirconate titanate [J].
Fan, HQ ;
Kim, HE .
JOURNAL OF APPLIED PHYSICS, 2002, 91 (01) :317-322
[7]   PLZT ELECTROOPTIC MATERIALS AND APPLICATIONS - A REVIEW [J].
HAERTLING, GH .
FERROELECTRICS, 1987, 75 (1-2) :25-55
[8]   Effect of Post-Annealing on the Microstructure and Electrical Properties of PMN-PZT Films Prepared by Aerosol Deposition Process [J].
Hahn, Byung-Dong ;
Ko, Kwan-Ho ;
Park, Dong-Soo ;
Choi, Jong-Jin ;
Yoon, Woon-Ha ;
Park, Chan ;
Kim, Doh-Yeon .
JOURNAL OF THE KOREAN CERAMIC SOCIETY, 2006, 43 (02) :106-113
[9]   Powder preparation for 0.5 Pb(Ni1/3Nb2/3)O3-0.15 PbZrO3-0.35PbTiO3 thick films by the aerosol deposition method [J].
Kawakami, Y. ;
Yoshikawa, H. ;
Komagata, K. ;
Akedo, J. .
JOURNAL OF CRYSTAL GROWTH, 2005, 275 (1-2) :E1295-E1300
[10]   Enhanced ferroelectric properties of Pb(Zr,Ti)O3 films by inducing permanent compressive stress - art. no. 072908 [J].
Lee, JW ;
Park, GT ;
Park, CS ;
Kim, HE .
APPLIED PHYSICS LETTERS, 2006, 88 (07)