Influence of the spatial and temporal structure of the deposited-energy distribution in swift-ion-induced sputtering

被引：21

作者：

Beuve, M ^{[1
]}

Stolterfoht, N

Toulemonde, M

Trautmann, C

Urbassek, HM

机构：

[1] Univ Lyon 1, Lab Informat Graph Image & Modelisat, F-69622 Villeurbanne, France

[2] Hahn Meitner Inst Berlin GmbH, D-14109 Berlin, Germany

[3] CIRIL, Lab CEA CNRS ISMRa, F-14070 Caen, France

[4] Gesell Schwerionenforsch mbH, D-64291 Darmstadt, Germany

[5] Univ Kaiserslautern, Fachbereich Phys, D-67663 Kaiserslautern, Germany

来源：

PHYSICAL REVIEW B | 2003年 / 68卷 / 12期

关键词：

D O I：

10.1103/PhysRevB.68.125423

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The sputter processes occurring under swift-ion bombardment in the electronic-stopping regime are investigated by molecular-dynamics simulations performed for a Lennard-Jones solid (Ar). Two aspects of the dynamics of the excited electronic subsystem are included in the simulation and their influence on the sputter yield is studied. First, we assume the energy transfer from the electronic to the atomic system not to be instantaneous, but to last for a period of time tau. For taugreater than or similar to1 ps, we find the sputter yield Y to become strongly nonlinear as a function of the stopping power dE/dx. Second, we test the influence of a nonhomogeneous spatial distribution of the electronic excitations. It is shown that such a spatial distribution also leads to a strongly nonlinear dependence of Y on dE/dx.

引用

页数：6

共 33 条

[1] Experimental study and Monte Carlo simulation of the correlation between electron emission and stopping power for swift proton impact on amorphous carbon target [J].

Beuve, M ;

Caron, M ;

Gervais, B ;

Rothard, H ;

Clouvas, A ;

Potiriadis, C .

EUROPEAN PHYSICAL JOURNAL D, 2001, 15 (03) :293-300

[2] SHOCK-WAVE MECHANISM FOR CLUSTER EMISSION AND ORGANIC-MOLECULE DESORPTION UNDER HEAVY-ION BOMBARDMENT [J].

BITENSKY, IS ;

PARILIS, ES .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (01) :26-36

[3] Spike models for sputtering: Effect of the surface and the material stiffness [J].

Bringa, EM ;

Jakas, M ;

Johnson, RE .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2000, 164 :762-771

[4] Molecular-dynamics simulations of electronic sputtering [J].

Bringa, EM ;

Johnson, RE ;

Jakas, M .

PHYSICAL REVIEW B, 1999, 60 (22) :15107-15116

[5] Coulomb explosion and thermal spikes [J].

Bringa, EM ;

Johnson, RE .

PHYSICAL REVIEW LETTERS, 2002, 88 (16) :4-165501

[6] Angular dependence of the sputtering yield from a cylindrical track [J].

Bringa, EM ;

Johnson, RE .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2001, 180 :99-104

[7] Electronic sputtering of solid O2 [J].

Bringa, EM ;

Johnson, RE .

SURFACE SCIENCE, 2000, 451 (1-3) :108-115

[8] Molecular dynamics study of non-equilibrium energy transport from a cylindrical track - I. Test of "spike" models [J].

Bringa, EM ;

Johnson, RE .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1998, 143 (04) :513-535

[9] Molecular dynamics study of non-equilibrium energy transport from a cylindrical track:: Part II -: Spike models for sputtering yield [J].

Bringa, EM ;

Johnson, RE ;

Dutkiewicz, L .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1999, 152 (2-3) :267-290

[10] ENERGY-TRANSFER IN SOLID ARGON DURING ION-BOMBARDMENT [J].

BROWN, WL ;

REIMANN, CT ;

JOHNSON, RE .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :9-15

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