Waveguide-integrated Si nano-photodiode with surface-plasmon antenna and its application to on-chip optical clock distribution

被引：15

作者：

Fujikata, Junichi ^{[1
]}

Nose, Koichi ^{[1
]}

Ushida, Jun ^{[1
]}

Nishi, Kenichi ^{[1
]}

Kinoshita, Masao ^{[1
]}

Shimizu, Takanori ^{[1
]}

Ueno, Toshihide ^{[1
]}

Okamoto, Daisuke ^{[1
]}

Gomyo, Akiko ^{[1
]}

Mizuno, Masayuki ^{[1
]}

Tsuchizawa, Tai ^{[2
]}

Watanabe, Toshifumi ^{[2
]}

Yamada, Koji ^{[2
]}

Itabashi, Seiichi ^{[2
]}

Ohashi, Keishi ^{[2
]}

机构：

[1] MIRAI Selete, Tsukuba, Ibaraki 3058501, Japan

[2] NTT Microsyst Integrat Labs, Kanagawa 2430198, Japan

来源：

APPLIED PHYSICS EXPRESS | 2008年 / 1卷 / 02期

关键词：

Trees (mathematics) - Atomic clocks - Nanotechnology - Silicon compounds - Surface plasmons - Silicon - Waveguides;

D O I：

10.1143/APEX.1.022001

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We developed a waveguide-integrated Si nano-photodiode (PD) with a surface plasmon (SP) antenna for on-chip optical clock distribution. The interfacial periodic nano-scale metal-semiconductor-metal Schottky electrodes were shown to function as an SP optical antenna and also as an optical coupler between a SiON waveguide and a very thin Si-absorption layer. Furthermore, a very high speed response of 17 ps as well as enhanced photoresponsivity was achieved for a 10-mu m coupling length. By using this technology, we fabricated a prototype of a large-scale-integration (LSI) on-chip optical clock system and demonstrated 5 GHz of optical clock circuit operation connected with a 4-branching H-tree structure. (c) 2008 The Japan Society of Applied Physics.

引用

页数：3

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