In situ thin-film texture determination

被引：37

作者：

Litvinov, D ^{[1
]}

O'Donnell, T ^{[1
]}

Clarke, R ^{[1
]}

机构：

[1] Univ Michigan, Randall Lab Phys, Ann Arbor, MI 48109 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1999年 / 85卷 / 04期

关键词：

D O I：

10.1063/1.369519

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A kinematic theory of reflection high energy electron diffraction (RHEED) is presented for textured polycrystalline thin films. RHEED patterns are calculated for arbitrary texture situations and for any general crystallographic orientation that may be encountered in thin-film growth. It is shown that the RHEED pattern can be used as a fast and convenient tool for in situ texture characterization. The approach also permits quantitative extraction of angular dispersion parameters which are useful for optimizing thin-film growth conditions. (C) 1999 American Institute of Physics. [S0021-8979(99)04904-X].

引用

页码：2151 / 2156

页数：6

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