Low-cost all-polymer integrated circuits

被引：751

作者：

Drury, CJ ^{[1
]}

Mutsaers, CMJ ^{[1
]}

Hart, CM ^{[1
]}

Matters, M ^{[1
]}

de Leeuw, DM ^{[1
]}

机构：

[1] Philips Res Labs, NL-5656 AA Eindhoven, Netherlands

来源：

APPLIED PHYSICS LETTERS | 1998年 / 73卷 / 01期

关键词：

D O I：

10.1063/1.121783

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A technology has been developed to make all polymer integrated circuits. it involves reproducible fabrication of field-effect transistors in which the semiconducting, conducting and insulating parts are all made of polymers. The fabrication on flexible substrates uses spin-coating of electrically active precursors and patternwise exposure of the deposited films. In the whole process stack integrity is maintained. Vertical interconnects are made mechanically. As a demonstrator functional 15-bit programmable code generators are fabricated. These circuits still operate when the foils are sharply bent. Due to the limited number of process steps the technology is potentially inexpensive. (C) 1998 American Institute of Physics.

引用

页码：108 / 110

页数：3

共 11 条

[1] High-performance plastic transistors fabricated by printing techniques [J].