Estimation of liquid phase diffusion coefficients of gallium and antimony in germanium from segregation data in crystal growth experiments

被引:10
作者
Garandet, J. P. [1 ]
机构
[1] CEA, DRT LITEN DTS LCS, F-73377 Le Bourget Du Lac, France
关键词
diffusion; fluid flows; segregation; Czochralski method; germanium-silicon alloys;
D O I
10.1016/j.jcrysgro.2008.03.042
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The objective of this paper is to propose new determinations of the diffusion coefficients of gallium and antimony in liquid germanium. To do so, an analysis of effective segregation coefficients obtained in Czochralski growth experiments is carried out in the frame of a self-consistent solidification model. As such, the deduced diffusivity values should be taken as more reliable than previously published data based on the analysis of solute segregation profiles, but the accuracy of the technique is limited by the scatter of the composition measurements. Comparison with existing data supports the necessity of setting up a dedicated experimental program for the measurement of liquid phase diffusion coefficients in germanium. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:3268 / 3273
页数:6
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