Formation of dimpled tantalum surfaces from electropolishing

被引:24
作者
El-Sayed, Hany [1 ]
Singh, Sherdeep [1 ]
Kruse, Peter [1 ]
机构
[1] McMaster Univ, Dept Chem, Hamilton, ON L8S 4M1, Canada
关键词
D O I
10.1149/1.2790792
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Electropolishing of tantalum in concentrated acids has recently been reported to result in highly ordered arrays of nanoscale dimples. In this paper we study in more detail the electrochemical conditions affecting the formation of regularly dimpled surfaces on tantalum. Solution aging and anodization potential were found to play important roles. The chronoamperometric curves at different anodization potentials give some insight into the changing balance of processes leading to dimpling during electropolishing. We have found that dimpled tantalum can be reproducibly prepared within the anodization potential range of 10-20 V. Higher voltages lead to anisotropic etching of the Ta grains and the resulting surface nanostructure is no longer ordered. Overall, the dimple-formation process can be said to be robust and tunable, with great promise for nanotemplating applications. (c) 2007 The Electrochemical Society.
引用
收藏
页码:C728 / C732
页数:5
相关论文
共 38 条
[1]   INFLUENCE OF ELECTROLYTE ON COMPOSITION OF ANODIC OXIDE FILMS ON TANTALUM [J].
AMSEL, G ;
CHERKI, C ;
FEUILLADE, G ;
NADAI, JP .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1969, 30 (09) :2117-+
[2]   TiO2 nanoparticle arrays prepared using a nanosphere lithography technique [J].
Bullen, HA ;
Garrett, SJ .
NANO LETTERS, 2002, 2 (07) :739-745
[3]   The effect of electrolyte composition on the fabrication of self-organized titanium oxide nanotube arrays by anodic oxidation [J].
Cai, QY ;
Paulose, M ;
Varghese, OK ;
Grimes, CA .
JOURNAL OF MATERIALS RESEARCH, 2005, 20 (01) :230-236
[4]   Anodic silicon dissolution in acidic fluoride electrolyte. A probe beam deflection investigation [J].
Cattarin, S ;
Decker, F ;
Dini, D .
JOURNAL OF PHYSICAL CHEMISTRY B, 1998, 102 (24) :4779-4784
[5]  
DELLOCA CJ, 1970, J ELECTROCHEM SOC, V117, P1545, DOI 10.1149/1.2407380
[6]   Formation of highly ordered arrays of dimples on tantalum at the nanoscale [J].
El-Sayed, Hany ;
Singh, Sherdeep ;
Greiner, Mark T. ;
Kruse, Peter .
NANO LETTERS, 2006, 6 (12) :2995-2999
[7]   Preparation and properties of tantalum pentoxide (Ta2O5) thin films for ultra large scale integrated circuits (ULSIs) application -: A review [J].
Ezhilvalavan, S ;
Tseng, TY .
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 1999, 10 (01) :9-31
[8]   New approaches to nanofabrication: Molding, printing, and other techniques [J].
Gates, BD ;
Xu, QB ;
Stewart, M ;
Ryan, D ;
Willson, CG ;
Whitesides, GM .
CHEMICAL REVIEWS, 2005, 105 (04) :1171-1196
[9]   Nanosphere lithography: A versatile nanofabrication tool for studies of size-dependent nanoparticle optics [J].
Haynes, CL ;
Van Duyne, RP .
JOURNAL OF PHYSICAL CHEMISTRY B, 2001, 105 (24) :5599-5611
[10]   Large-area nanoscale patterning: Chemistry meets fabrication [J].
Henzie, J ;
Barton, JE ;
Stender, CL ;
Odom, TW .
ACCOUNTS OF CHEMICAL RESEARCH, 2006, 39 (04) :249-257