New approaches to nanofabrication: Molding, printing, and other techniques

被引:1676
作者
Gates, BD
Xu, QB
Stewart, M
Ryan, D
Willson, CG
Whitesides, GM
机构
[1] Harvard Univ, Dept Chem & Chem Biol, Cambridge, MA 02138 USA
[2] Univ Texas, Dept Chem & Biochem, Austin, TX 78712 USA
关键词
D O I
10.1021/cr030076o
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
This review covers research published in nanofabrication during the interval from 1999 to mid-2004 and to specific techniques demonstrated to be capable of patterning a substrate with features ≤100 nm in both lateral and vertical dimensions. The first area of unconventional nanofabrication reviewed is a set of techniques that uses organic materials to replicate nanoscale patterns or masters. The second area is scanning probe lithography (SPL). The last two areas are edge lithography and self-assembly. Overall, these approaches are expected to be useful in research laboratories wishing to explore ideas in nanoscience.
引用
收藏
页码:1171 / 1196
页数:26
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