Monolithic integration of waveguide polymer electrooptic modulators on VLSI circuitry

被引：30

作者：

Kalluri, S

Ziari, M

Chen, AT

Chuyanov, V

Steier, WH

Chen, DT

Jalali, B

Fetterman, H

Dalton, LR

机构：

[1] SDL INC,SAN JOSE,CA 95134

[2] UNIV SO CALIF,DEPT CHEM,LOS ANGELES,CA 90089

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1996年 / 8卷 / 05期

关键词：

Light modulators - MESFET devices - Optical communication - Optical switches - Optical waveguides - Polymers - Semiconducting gallium arsenide - VLSI circuits;

D O I：

10.1109/68.491566

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We demonstrated some of the critical technology that is needed for the monolithic integration of polymer electrooptic modulators and VLSI circuitry by fabricating and testing a phase slab modulator on nonplanar VLSI circuits, We demonstrated the survival of GaAs MESFET's to the high-voltage poling and polymer modulator fabrication procedures, We also implemented an electrical interconnect scheme between the electronics and photonics layers.

引用

页码：644 / 646

页数：3