High-quality AlInN for high index contrast Bragg mirrors lattice matched to GaN

被引:241
作者
Carlin, JF [1 ]
Ilegems, M [1 ]
机构
[1] Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Inst Quantum Elect & Photon, CH-1015 Lausanne, Switzerland
关键词
D O I
10.1063/1.1596733
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the growth by metalorganic vapor phase epitaxy of high-quality Al1-xInxN layers and AlInN/GaN Bragg mirrors near lattice matched to GaN. Layers are grown on a GaN buffer layer with no cracks over full 2 in. sapphire wafers. The index contrast relative to GaN is around 7% for wavelengths ranging from 950 to 450 nm. We demonstrate the growth of a crack-free, 20 pairs Al0.84In0.16N/GaN distributed Bragg reflector centered at 515 nm with an over 90% reflectivity and a 35 nm stop band. The growth of high quality AlInN lattice matched to GaN may represent a breakthrough in GaN-based optoelectronics which is presently limited by the lack of a high-index-contrast and high-band gap lattice-matched material. (C) 2003 American Institute of Physics.
引用
收藏
页码:668 / 670
页数:3
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