Effect of annealing and hydrogen plasma treatment on the voltammetric and impedance behavior of the diamond electrode

被引:27
作者
Ramesham, R [1 ]
机构
[1] Auburn Univ, Space Power Inst, Auburn, AL 36849 USA
基金
美国国家航空航天局; 美国国家科学基金会;
关键词
CVD diamond; diamond; hydrogen plasma treatment; annealing; cyclic voltammetry; AC impedance; electrochemistry; plasma processing and deposition; photovoltage;
D O I
10.1016/S0040-6090(97)00592-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Undoped polycrystalline diamond thin films have been grown on molybdenum substrates by microwave-assisted chemical vapor deposition using a hydrogen and methane gas mixture. Cyclic voltammetric behavior of diamond films has been studied in 0.5 M NaCl solution as a function of annealing in nitrogen gas at 425 degrees C and hydrogen microwave plasma treatments at 800 degrees C. Preliminary voltammetry studies have shown that the annealed diamond film has a high resistivity, and hydrogen microwave plasma-treated diamond has a low resistivity. These treatments have an effect on the extent of the gas evolution reaction either in the anodic or in the cathodic polarization of the diamond electrode. AC impedance and DC linear polarization techniques have provided the data on the increase and decrease in diamond film resistance upon annealing and hydrogen microwave plasma treatment, respectively, which further corroborates the voltammetry studies. These electrochemical measurements may qualitatively suggest that there may be a change in electron affinity characteristics of the diamond surface as a function of various pretreatments, (C) 1998 Elsevier Science S.A.
引用
收藏
页码:222 / 228
页数:7
相关论文
共 26 条
[1]   ELECTRICAL-PROPERTIES OF HYDROGENATED DIAMOND [J].
ALBIN, S ;
WATKINS, L .
APPLIED PHYSICS LETTERS, 1990, 56 (15) :1454-1456
[2]   ANALYSIS OF STRAY CAPACITANCE IN THE KELVIN METHOD [J].
BAIKIE, ID ;
VENDERBOSCH, E ;
MEYER, JA ;
ESTRUP, PJZ .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1991, 62 (03) :725-735
[3]   AUTOMATIC KELVIN PROBE COMPATIBLE WITH ULTRAHIGH-VACUUM [J].
BAIKIE, ID ;
VANDERWERF, KO ;
OERBEKKE, H ;
BROEZE, J ;
VANSILFHOUT, A .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (05) :930-934
[4]  
BAIKIE ID, 1992, MATER RES SOC SYMP P, V261, P149, DOI 10.1557/PROC-261-149
[5]  
BAIKIE ID, 1991, REV SCI INSTR
[6]  
CELII FG, 1991, NEW DIAMOND SCI NDST, V2, P631
[7]   SELECTIVE DEPOSITION OF DIAMOND FILMS [J].
DAVIDSON, JL ;
ELLIS, C ;
RAMESHAM, R .
JOURNAL OF ELECTRONIC MATERIALS, 1989, 18 (06) :711-715
[8]   HYDROGEN PASSIVATION OF ELECTRICALLY ACTIVE DEFECTS IN DIAMOND [J].
LANDSTRASS, MI ;
RAVI, KV .
APPLIED PHYSICS LETTERS, 1989, 55 (14) :1391-1393
[9]   RESISTIVITY OF CHEMICAL VAPOR-DEPOSITED DIAMOND FILMS [J].
LANDSTRASS, MI ;
RAVI, KV .
APPLIED PHYSICS LETTERS, 1989, 55 (10) :975-977
[10]  
MALTA DP, 1997, MICROSCOPY ANAL JAN, P7