Role of metallic neutrals and gaseous molecular ions in a copper cathodic arc operated with oxygen gas

被引:17
作者
Lepone, A [1 ]
Kelly, H [1 ]
Márquez, A [1 ]
机构
[1] Univ Buenos Aires, Fac Ciencias Exactas & Nat, Dept Fis, Inst Fis Plasma,CONICET, RA-1428 Buenos Aires, DF, Argentina
关键词
D O I
10.1063/1.1397290
中图分类号
O59 [应用物理学];
学科分类号
摘要
The plasma-neutral gas structure generated in a copper cathodic arc operated with oxygen gas at a constant current level of 100 A has been investigated by employing a Langmuir spherical probe and a calorimetric technique. The plasma potential and electron temperature at several axial distances (between 10 and 25 cm) from the cathode surface and for different O-2 pressure values (between 0.5 and 5 Pa) have been measured. A simplified one-dimensional model which incorporates the relevant atomic processes of the problem (charge-exchange, lateral diffusion loses, electron impact ionization, and dissociative recombination) is developed. This model allows calculating densities and drift velocities of the different species and, in particular, predicts the creation of a considerable number of metallic neutrals and gaseous ions. A comparison of the experimental ion saturation probe current and the heat source term derived from the calorimetric measurements with the corresponding quantities predicted by the model is performed. We found good agreement between theory and experiment, notwithstanding the fact that the physical quantities presented large variations, and the atomic reaction rates varied for several orders of magnitude, over the range of gas pressure and axial position values investigated. (C) 2001 American Institute of Physics.
引用
收藏
页码:3174 / 3181
页数:8
相关论文
共 17 条
[1]   ION FLUX CHARACTERISTICS IN ARC VAPOR-DEPOSITION OF TIN [J].
BERGMAN, C .
SURFACE & COATINGS TECHNOLOGY, 1988, 36 (1-2) :243-255
[2]   Influence of gas pressure and cathode composition on ion energy distributions in filtered cathodic vacuum arcs [J].
Bilek, MMM ;
Martin, PJ ;
McKenzie, DR .
JOURNAL OF APPLIED PHYSICS, 1998, 83 (06) :2965-2970
[3]  
BOOK DL, 1981, PHYSICS VADE MECUUM, pCH18
[4]   PRINCIPLES AND APPLICATIONS OF VACUUM-ARC COATINGS [J].
BOXMAN, RL ;
GOLDSMITH, S .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1989, 17 (05) :705-712
[5]   ANALYSIS OF ELECTRODE PRODUCTS EMITTED BY DC ARCS IN A VACUUM AMBIENT [J].
DAVIS, WD ;
MILLER, HC .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (05) :2212-+
[6]  
DEMIDENKO II, 1981, SOV PHYS-TECH PHYS, V22, P28
[7]   Electrostatic probe measurements in the outer region of a low pressure arc [J].
Grondona, D ;
Kelly, H ;
Márquez, A ;
Minotti, F .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1998, 31 (23) :3358-3367
[8]   Influence of an electrical field on the macroparticle size distribution in a vacuum arc [J].
Keidar, M ;
Aharonov, R ;
Beilis, II .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1999, 17 (05) :3067-3073
[9]   Characterization of plasma-gas interactions in a copper cathodic are operated in oxygen [J].
Kelly, H ;
Lepone, A ;
Márquez, A .
JOURNAL OF APPLIED PHYSICS, 2001, 89 (03) :1567-1572
[10]   Structure of plasmas generated by the interaction between metallic ions and neutral gas particles in a low-pressure arc [J].
Kelly, H ;
Lepone, A ;
Minotti, F .
JOURNAL OF APPLIED PHYSICS, 2000, 87 (12) :8316-8322