Concentration profile calculation for buried ion-exchanged channel waveguides in glass using explicit space-charge analysis

被引:13
作者
Hazart, J [1 ]
Minier, V [1 ]
机构
[1] GeeO, F-38240 Meylan, France
关键词
diffused ion-exchanged waveguides; field-assisted ion exchange; integrated optics; mixed alkali effect; nonlinear diffusion simulation; theory of ion exchange in glass;
D O I
10.1109/3.914411
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ionic conductivity inhomogeneity and its relation to space charge is analyzed in the case of a two-ion exchange for channel waveguide fabrication in optical glass, The space-charge evolution equation is derived and discussed in a general binary ion exchange context, This leads to an efficient algorithm which computes current-density nonuniformity in the field-assisted burying of ion-exchanged waveguides, The algorithm exhibits excellent agreement with the classic potential equation perturbed by nonhomogeneous ionic conductivity, and is appreciably faster, We show that the homogeneous current-density assumption is inaccurate for the calculation of the burying depth and waveguide size in the case of a realistic glass with nonlinear ionic diffusivity.
引用
收藏
页码:606 / 612
页数:7
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