Ni and Ti Schottky barriers on n-AlGaN grown on SiC substrates

被引:92
作者
Yu, LS [1 ]
Qiao, DJ
Xing, QJ
Lau, SS
Boutros, KS
Redwing, JM
机构
[1] Univ Calif San Diego, Dept Elect & Comp Engn, La Jolla, CA 92093 USA
[2] Epitron ATMI, Phoenix, AZ 85027 USA
关键词
D O I
10.1063/1.121767
中图分类号
O59 [应用物理学];
学科分类号
摘要
The electrical characteristics of Ni and Ti Schottky barriers on n-Al0.15Ga0.85N on SiC were investigated. We report that the barrier height for Ni on n-Al0.15Ga0.85N was about 1.26 eV and about 1 eV or less for Ti. These barrier heights are about 0.3-0.4 eV larger than those for Ni and Ti on n-GaN, which are in good agreement with Schottky model predictions. (C) 1998 American Institute of Physics. [S0003-6951 (98)03528-1].
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页码:238 / 240
页数:3
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