On the roll-off of the activation energy plot in high-temperature flash memory retention tests and its impact on the reliability assessment

被引:31
作者
Govoreanu, Bogdan [1 ]
Van Houdt, Jan [1 ]
机构
[1] IMEC, B-3001 Louvain, Belgium
关键词
activation energy; flash memory; high-kappa; interpoly dielectrics; retention time;
D O I
10.1109/LED.2007.914089
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this letter, we discuss the experimental behavior of high-kappa interpoly dielectrics in floating gate memory devices with respect to the activation energy. plot. It is shown that the Arrhenius extrapolation may overestimate the ten-year lifetime predictions. However, a clear correlation between the activation energy plot and the trap levels in the interpoly dielectric can be established, based on theoretical grounds. It is shown that a single-trap level typically follows an 1/T law, while a roll-off of the activation energy plot suggests the existence of various trap levels in the interpoly dielectrics. These findings have practical implications on the high-temperature retention testing methodology of novel nonvolatile memory with high-kappa interpoly dielectrics.
引用
收藏
页码:177 / 179
页数:3
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