Large-area 3D nanostructures with octagonal quasicrystalline symmetry via phase-mask lithography

被引：42

作者：

Bita, Ion

Choi, Taeyi

Walsh, Michael E.

Smith, Henry L.

Thomas, Edwin L.

机构：

[1] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA

[2] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA

来源：

ADVANCED MATERIALS | 2007年 / 19卷 / 10期

关键词：

D O I：

10.1002/adma.200700178

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

3D nanostructured quasi crystalline materials significantly larger than feasible with previously reported techniques are produced. 2D quasiperiodic surface relief templates with 8mm point group symmetry are made by multiple-exposure interference lithography. Phase-mask lithography with corresponding PDMS masks produce bicontinuous 3D axial quasicrystal SU-8 structures (see figure).

引用

收藏

页码：1403 / +

页数：6

相关论文

共 25 条

[1]

BITA I, UNPUB

[2] OPTICAL MATTER - CRYSTALLIZATION AND BINDING IN INTENSE OPTICAL-FIELDS [J].

BURNS, MM ;

FOURNIER, JM ;

GOLOVCHENKO, JA .

SCIENCE, 1990, 249 (4970) :749-754

[3] Fabrication of photonic crystals for the visible spectrum by holographic lithography [J].

Campbell, M ;

Sharp, DN ;

Harrison, MT ;

Denning, RG ;

Turberfield, AJ .

NATURE, 2000, 404 (6773) :53-56

[4] Photonic band gaps in two dimensional photonic quasicrystals [J].

Chan, YS ;

Chan, CT ;

Liu, ZY .

PHYSICAL REVIEW LETTERS, 1998, 80 (05) :956-959

[5] Production of quasi-crystal template patterns using a dual beam multiple exposure technique [J].

Gauthier, RC ;

Ivanov, A .

OPTICS EXPRESS, 2004, 12 (06) :990-1003

[6] QUANTIZED MOTION OF COLD CESIUM ATOMS IN 2-DIMENSIONAL AND 3-DIMENSIONAL OPTICAL POTENTIALS [J].

GRYNBERG, G ;

LOUNIS, B ;

VERKERK, P ;

COURTOIS, JY ;

SALOMON, C .

PHYSICAL REVIEW LETTERS, 1993, 70 (15) :2249-2252

[7] Atomic diffusion in an optical quasicrystal with five-fold symmetry [J].

Guidoni, L ;

Dépret, B ;

di Stefano, A ;

Verkerk, P .

PHYSICAL REVIEW A, 1999, 60 (06) :R4233-R4236

[8]

Janot C, 1994, QUASICRYSTALS PRIMER

[9] Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks [J].

Jeon, S ;

Park, JU ;

Cirelli, R ;

Yang, S ;

Heitzman, CE ;

Braun, PV ;

Kenis, PJA ;

Rogers, JA .

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2004, 101 (34) :12428-12433

[10]

Joannopoulos J. D., 1995, PHOTONIC CRYSTALS MO