Zinc oxide nanorod and nanowire for humidity sensor

被引：388

作者：

Zhang, YS

Yu, K

Jiang, DS

Zhu, ZQ

Geng, HR

Luo, LQ

机构：

[1] E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China

[2] Shandong Univ, Sch Phys & Microelect, Jinan 250061, Peoples R China

[3] Luoyang Technol Coll, Dept Comp Sci & Technol, Luoyang 471003, Peoples R China

[4] Wuhan Univ Technol, Fiber Opt Sensing Technol Res Ctr, Wuhan 430070, Peoples R China

[5] Jinan Univ, Sch Mat Sci & Engn, Jinan 250022, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2005年 / 242卷 / 1-2期

基金：

中国国家自然科学基金;

关键词：

zinc oxide nanomaterial; vapor-phase transport; humidity sensor;

D O I：

10.1016/j.apsusc.2004.08.013

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

ZnO nanorod and nanowire films were fabricated on the Si substrates with comb type Pt electrodes by the vapor-phase transport method, and their humidity sensitive characteristics have been investigated. These nanomaterial films show high-humidity sensitivity, good long-term stability and fast response time. It was found that the resistance of the films decreases with increasing relative humidity (RH). At room temperature (RT), resistance changes of more than four and two orders of magnitude were observed when ZnO nanowire and nanorod devices were exposed, respectively, to a moisture pulse of 97% relative humidity. It appears that the ZnO nanomaterial films can be used as efficient humidity sensors. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：212 / 217

页数：6

共 14 条

[1] Large-quantity free-standing ZnO nanowires [J].