Fabrication of silicon inverse woodpile photonic crystals

被引：60

作者：

Hermatschweiler, Martin

Ledermann, Alexandra

Ozin, Geoffrey A.

Wegener, Martin

von Freymann, Georg

机构：

[1] Univ Karlsruhe, Inst Angew Phys, D-76128 Karlsruhe, Germany

[2] Univ Karlsruhe, CFN, DFG, D-76128 Karlsruhe, Germany

[3] Forschungszentrum Karlsruhe Helmholtz Gemeinschaf, Inst Nanotechnol, D-76021 Karlsruhe, Germany

[4] Univ Toronto, Dept Chem, Mat Chem Res Grp, Toronto, ON M5S 3H6, Canada

来源：

ADVANCED FUNCTIONAL MATERIALS | 2007年 / 17卷 / 14期

关键词：

D O I：

10.1002/adfm.200601074

中图分类号：

O6 [化学];

学科分类号：

0703 [化学];

摘要：

Silicon inverse woodpile photonic crystals are fabricated for the first time. Our approach, which is based on direct laser writing of polymeric templates and a novel silicon single-inversion procedure, leads to high-quality structures with gap/midgap ratios of 14.2%, centered at a wavelength of 2.5 mu m. It is shown that gap/midgap ratios as large as 20.5%, centered at 1.55 mu m, may become possible in the future.

引用

收藏

页码：2273 / 2277

页数：5

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