Shortest intersubband transition wavelength (1.68 μm) achieved in AlN/GaN multiple quantum wells by metalorganic vapor phase epitaxy

被引:37
作者
Waki, I
Kumtornkittikul, C
Shimogaki, Y
Nakano, Y
机构
[1] Univ Tokyo, Sch Engn, JST CREST, Bunkyo Ku, Tokyo 1138656, Japan
[2] Univ Tokyo, Adv Sci & Technol Res Ctr, JST CREST, Meguro Ku, Tokyo 1538904, Japan
关键词
D O I
10.1063/1.1586473
中图分类号
O59 [应用物理学];
学科分类号
摘要
Two-hundred-period high-quality AlN/GaN multiple quantum wells (MQWs) grown by metalorganic vapor phase epitaxy are studied using high-resolution x-ray diffraction, transmission electron microscopy, and optical transmission spectroscopy. Excellent interfaces of the MQWs are confirmed by these measurements. The strong intersubband absorption peak at a wavelength of 1.68 m m is achieved for AlN (1.6 nm)/GaN(1.7 nm) MQW. The full width at half-maximum of the absorption peak is estimated to be 27 meV. (C) 2003 American Institute of Physics.
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收藏
页码:4465 / 4467
页数:3
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