Fundamental aspects and applications of glow discharge spectrometric techniques

Glow discharges are kind of plasmas which are used in many fields of application, including analytical spectrometry. This review addresses both the fundamental aspects and analytical applications of glow discharges. In the first part, a systematic overview of the most important plasma processes is presented. To obtain better insight into the complexity of the glow discharge, both mathematical modeling and experimental plasma diagnostics can be carried out. Therefore, the models that were developed for a glow discharge are presented and typical results (e.g. three-dimensional density profiles, fluxes and energy distributions of the various plasma species, the electric field and potential distributions, information about collision processes in the plasma and about sputtering at the cathode, etc.) are summarized. Moreover, the most important plasma diagnostic techniques for glow discharges are discussed. In the second part, an overview is given of the various analytical applications of glow discharges. (C) 1998 Elsevier Science B.V.