共 21 条
[5]
Chapman B. N., 1980, GLOW DISCHARGE PROCE
[6]
CURRENT BALANCE AT THE SURFACE OF A COLD-CATHODE
[J].
PHYSICAL REVIEW LETTERS,
1987, 58 (25)
:2668-2671
[9]
OPTICAL SPECTROSCOPY FOR DIAGNOSTICS AND PROCESS-CONTROL DURING GLOW-DISCHARGE ETCHING AND SPUTTER DEPOSITION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1978, 15 (05)
:1718-1729
[10]
GRIFFITHS TR, 1990, I PHYS C SER, V113, P215