Laser induced decomposition of a designed and a commercial polymer studied by ns-interferometry and shadowgraphy

被引:8
作者
Hauer, M
Funk, DJ
Lippert, T [1 ]
Wokaun, A
机构
[1] Paul Scherrer Inst, CH-5232 Villigen, Switzerland
[2] Los Alamos Natl Lab, Los Alamos, NM 87545 USA
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2003年 / 77卷 / 02期
关键词
D O I
10.1007/s00339-003-2117-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Commercially available polymers often exhibit quite poor laser ablation properties for irradiation wavelengths around 248 nm. At these wavelengths, the absorption is due to photostable aromatic groups. Photolabile triazene polymers were developed to compare the influence of a photolabile group on the laser ablation process. The photochemically active triazene group has a strong absorption band at 332 nm, whereas the second absorption maximum at 220 nm is due to the photostable aromatic group. By irradiating at 308 nm and 193 nm, the influence of the photochemically active group on the ablation process can be studied. The etching of the triazene polymer starts and ends with the laser pulse. No surface swelling, which is assigned to photothermal ablation, is detected for fluences above the threshold of ablation. The expansion of the laser ablation induced shockwave was measured for the photolabile triazene polymer and the photostable polyimide. The speed of the shockwave increases with fluence and is higher for irradiation with 193 nm than with 308 nm. A shockwave with equal or higher velocity is observed for the triazene polymer compared with polyimide.
引用
收藏
页码:297 / 301
页数:5
相关论文
共 30 条
[1]   DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J].
ANDREW, JE ;
DYER, PE ;
FORSTER, D ;
KEY, PH .
APPLIED PHYSICS LETTERS, 1983, 43 (08) :717-719
[2]   Laser induced microexplosions of a photosensitive polymer [J].
Bennett, LS ;
Lippert, T ;
Furutani, H ;
Fukumura, H ;
Masuhara, H .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1996, 63 (04) :327-332
[3]  
BOYD IA, 1992, PHOTOCHEMICAL PROCES
[4]   Shadowgraphic and interferometric investigations on Nd:YAG laser-induced vapor/plasma plumes for different processing wavelengths [J].
Breitling, D ;
Schittenhelm, H ;
Berger, P ;
Dausinger, F ;
Hügel, H .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 69 (Suppl 1) :S505-S508
[5]   Dynamics of excited and ionic states of N,N,N′,N′-tetramethyl-p-phenylenediamine in poly(methyl methacrylate) under ablation condition [J].
Fujiwara, H ;
Fukumoto, H ;
Fukumura, H ;
Masuhara, H .
RESEARCH ON CHEMICAL INTERMEDIATES, 1998, 24 (08) :879-892
[6]   TIME-RESOLVED SPECTROSCOPIC AND PHOTOGRAPHIC STUDIES ON LASER-ABLATION OF POLY(METHYL METHACRYLATE) FILM DOPED WITH BIPHENYL [J].
FUKUMURA, H ;
TAKAHASHI, E ;
MASUHARA, H .
JOURNAL OF PHYSICAL CHEMISTRY, 1995, 99 (02) :750-757
[7]   NANOSECOND TIME-RESOLVED INTERFEROMETRIC STUDY ON MORPHOLOGICAL DYNAMICS OF DOPED POLY(METHYL METHACRYLATE) FILM UPON LASER-ABLATION [J].
FURUTANI, H ;
FUKUMURA, H ;
MASUHARA, H .
APPLIED PHYSICS LETTERS, 1994, 65 (26) :3413-3415
[8]   Laser-induced decomposition and ablation dynamics studied by nanosecond interferometry .1. A triazenopolymer film [J].
Furutani, H ;
Fukumura, H ;
Masuhara, H ;
Lippert, T ;
Yabe, A .
JOURNAL OF PHYSICAL CHEMISTRY A, 1997, 101 (32) :5742-5747
[9]   Laser-induced decomposition and ablation dynamics studied by nanosecond interferometry. 2. A reactive nitrocellulose film [J].
Furutani, H ;
Fukumura, H ;
Masuhara, H ;
Kambara, S ;
Kitaguchi, T ;
Tsukada, H ;
Ozawa, T .
JOURNAL OF PHYSICAL CHEMISTRY B, 1998, 102 (18) :3395-3401
[10]   Ultrafast interferometric microscopy for laser-driven shock wave characterization [J].
Gahagan, KT ;
Moore, DS ;
Funk, DJ ;
Reho, JH ;
Rabie, RL .
JOURNAL OF APPLIED PHYSICS, 2002, 92 (07) :3679-3682