XPS structural characterization of hydrogenated amorphous carbon thin films prepared by shielded arc ion plating

被引：121

作者：

Taki, Y ^{[1
]}

Takai, O ^{[1
]}

机构：

[1] Nagoya Univ, Dept Mat Proc Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan

来源：

THIN SOLID FILMS | 1998年 / 316卷 / 1-2期

关键词：

XPS; amorphous carbon; arc ion plating;

D O I：

10.1016/S0040-6090(98)00386-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Hydrogenated amorphous carbon (a-C:H) thin films were synthesized by shielded are ion plating. Structural characterization of the a-C:H films was performed using Raman, infrared and X-ray photoelectron spectroscopy (WS). It is concluded that XPS is useful for estimating sp(2) and sp(3) carbon networks in the a-C:H films by analyzing the peak positions and FWHM (full width at half maximum) values of XPS C 1s spectra. (C) 1998 Elsevier Science S.A.

引用

页码：45 / 50

页数：6

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