Microlenses with defined contour shapes

被引:30
作者
Cadarso, V. J. [1 ]
Perera-Nunez, J. [2 ,3 ]
Jacot-Descombes, L. [1 ]
Pfeiffer, K. [4 ]
Ostrzinski, U. [4 ]
Voigt, A. [4 ]
Llobera, A. [5 ]
Gruetzer, G. [4 ]
Brugger, J. [1 ]
机构
[1] Ecole Polytech Fed Lausanne, Microsyst Lab LMIS1, CH-1015 Lausanne, Switzerland
[2] Univ Extremadura, Dept Appl Phys, Badajoz 06006, Spain
[3] Networking Res Ctr Bioengn Biomat & Nanomed CIBER, Badajoz, Spain
[4] Micro Resist Technol GmbH, D-12555 Berlin, Germany
[5] Inst Microelect Barcelona IMB CNM CSIC, Barcelona 08193, Spain
基金
欧洲研究理事会;
关键词
All Open Access; Gold;
D O I
10.1364/OE.19.018665
中图分类号
O43 [光学];
学科分类号
070207 [光学];
摘要
Ink-jet printing of optical ink over SU-8 pillars is here proposed as a technology for obtaining microlenses with shape control. To demonstrate the flexibility of this method, microlenses with five different contour shapes (ranging from circular and elliptical to toric or more advanced geometries) have been fabricated. Furthermore, the optical properties of the different fabricated lenses have been experimentally investigated. Focal distance, numerical aperture (NA) and full-width at half maximum (FWHM) of the microlenses have been determined. Arrays of microlenses showed an identical behavior with a standard deviation in the total intensity of only 7%. Additionally, the focal plane of the fabricated symmetric microlenses and the Sturm interval of the non-symmetric ones have been obtained. The experimental results demonstrate the validity and flexibility of the proposed technology. (C) 2011 Optical Society of America
引用
收藏
页码:18665 / 18670
页数:6
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