Micromachined chemical reaction system

被引：30

作者：

Koch, M ^{[1
]}

Schabmueller, CGJ ^{[1
]}

Evans, AGR ^{[1
]}

Brunnschweiler, A ^{[1
]}

机构：

[1] Univ Southampton, MEMS Res Grp, Dept Elect & Comp Sci, Southampton SO17 1BJ, Hants, England

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 74卷 / 1-3期

关键词：

MEMS; microfluidics; chemical reaction system; microfluidic circuitboard;

D O I：

10.1016/S0924-4247(98)00318-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a micromachined chemical reaction system, which is based on the integration of several microfluidic devices. The system is realised by anodically bonding two pumps, two flowsensors and a micromixer on top of a micromachined fluidic circuit board. The pumps are membrane pumps with piezoelectric actuation. The pumping rates are from, -220 to 490 mu l/min. The flowsensors are based on the temperature difference method. The principle of the mixing/reaction chamber used for this system is diffusion because of the small value of the Reynold's number in micro-capillaries. Two fluids/chemicals join through laterally alternated inlets in order to increase the boundary surface between them. The whole system is functional and leakage through the joints does not occur. Tests have been done with ethanol, flowing through both system inlets and joining at the mixing unit. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：207 / 210

页数：4

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[No title captured]

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