360° rotating micro mirror for transmitting and sensing optical coherence tomography signals

被引：16

作者：

Ayers, JA ^{[1
]}

Tang, WC ^{[1
]}

Chen, ZP ^{[1
]}

机构：

[1] Univ Calif Irvine, Dept Biomed Engn, Irvine, CA 92717 USA

来源：

PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3 | 2004年

关键词：

micro mirror; MEMS; OCT;

D O I：

10.1109/ICSENS.2004.1426209

中图分类号：

T [工业技术];

学科分类号：

08 [工学];

摘要：

We have designed a micro actuator system for precise transmission and reception of bio-optical signals. Our system consists of a first-in-kind polysilicon micro mirror held stationary at a 45 angle on top of a 360 degrees-rotating platform driven by a scratch drive array [1]. The entire system is designed with a 1-mm diameter size constraint. This constraint will allow the device to fit inside the tip of a catheter for use in biomedical endoscopy. We have developed two designs based on a commercial micromachining process to accomplish this. One mirror assembly is pulled into position at 45 degrees while the other mirror assembly flips over itself into place. The benefit of the former mirror is that it can easily be coated with gold to improve reflectivity at the foundry. The benefit of the latter is that the optically flat bottom surface of the polysilicon layer is used as the reflective surface of the mirror. Photoresist "hinges" [2] are used to allow this system to self-assemble by surface tension induced. through heating.

引用

页码：497 / 500

页数：4

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