Surface tension powered self-assembly of 3-D micro-optomechanical structures

被引：93

作者：

Syms, RRA ^{[1
]}

机构：

[1] Univ London Imperial Coll Sci Technol & Med, Opt & Semiconductor Devices Sect, Dept Elect & Elect Engn, London SW7 2BT, England

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1999年 / 8卷 / 04期

基金：

英国工程与自然科学研究理事会;

关键词：

MEMS; microactuator; micromirror; MOEMS; scanner; self-assembly; 3-D microstructure;

D O I：

10.1109/84.809060

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new surface micromachining process for surface tension powered self-assembly of silicon-based microstructures is described. Mechanical parts are formed from bonded silicon-on-insulator material and rotated out-of-plane by melting photoresist pads at low temperature. Simple mechanisms that allow accurate control of the final angle are introduced and used to construct fixed 45 degrees mirrors and scanning mirror assemblies. [435].

引用

页码：448 / 455

页数：8

共 38 条

[1]

Allen M. G., 1989, Proceedings: IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (IEEE Cat. No.89THO249-3), P76, DOI 10.1109/MEMSYS.1989.77965

[2] MOVABLE MICROMACHINED SILICON PLATES WITH INTEGRATED POSITION SENSING [J].